The Research on the Model of a Precision Magnetic Stage System

Abstract:

Article Preview

This paper introduces the structure and work principle of a two-coordinate precision magnetic stage. “The same plane” mode and magnetic driver is adopted, on the basis of analytical field, and response simulation is finished. The experiments result expresses that the positioning accuracy of the magnetic stage reaches nanometer accuracy.

Info:

Periodical:

Advanced Materials Research (Volumes 201-203)

Edited by:

Daoguo Yang, Tianlong Gu, Huaiying Zhou, Jianmin Zeng and Zhengyi Jiang

Pages:

2079-2082

DOI:

10.4028/www.scientific.net/AMR.201-203.2079

Citation:

Y. Zhang et al., "The Research on the Model of a Precision Magnetic Stage System", Advanced Materials Research, Vols. 201-203, pp. 2079-2082, 2011

Online since:

February 2011

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Price:

$35.00

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