The Research on the Model of a Precision Magnetic Stage System

Yi Zhang; Hui Zhi Sun; Hong Zhou

doi:10.4028/www.scientific.net/AMR.201-203.2079

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 201-203The Research on the Model of a Precision Magnetic...

The Research on the Model of a Precision Magnetic Stage System

Abstract:

This paper introduces the structure and work principle of a two-coordinate precision magnetic stage. “The same plane” mode and magnetic driver is adopted, on the basis of analytical field, and response simulation is finished. The experiments result expresses that the positioning accuracy of the magnetic stage reaches nanometer accuracy.

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Advanced Manufacturing Systems, ICMSE 2011

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Periodical:

Advanced Materials Research (Volumes 201-203)

Pages:

2079-2082

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.201-203.2079

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Online since:

February 2011

Authors:

Yi Zhang, Hui Zhi Sun, Hong Zhou

Keywords:

Halbach Magnet Array, Nanometer Precision, Nonlinearity, Same Plane

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