The Research on the Model of a Precision Magnetic Stage System
This paper introduces the structure and work principle of a two-coordinate precision magnetic stage. “The same plane” mode and magnetic driver is adopted, on the basis of analytical field, and response simulation is finished. The experiments result expresses that the positioning accuracy of the magnetic stage reaches nanometer accuracy.
Daoguo Yang, Tianlong Gu, Huaiying Zhou, Jianmin Zeng and Zhengyi Jiang
Y. Zhang et al., "The Research on the Model of a Precision Magnetic Stage System", Advanced Materials Research, Vols. 201-203, pp. 2079-2082, 2011