Study on Microetching Performance of Hydrogen Peroxide / Sulfuric Acid System

Abstract:

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In order to get the optimum technological conditions of the hydrogen peroxide /sulfuric acid system,the static corrosion method was used to study the related parameters including compositions of the microetching system and the operation temperature. The results of the experiment show that the microetching performance of the hydrogen peroxide /sulfuric acid system was excellent under optimum conditions of maintaining temperature at 30~35, copper concentration about 25 g/L, hydrogen peroxide 30~40 g/L and sulfuric acid content 70~90 g/L . The process of microetching is stable and controllable.

Info:

Periodical:

Advanced Materials Research (Volumes 233-235)

Edited by:

Zhong Cao, Lixian Sun, Xueqiang Cao, Yinghe He

Pages:

614-618

DOI:

10.4028/www.scientific.net/AMR.233-235.614

Citation:

Y. Yang and D. L. Li, "Study on Microetching Performance of Hydrogen Peroxide / Sulfuric Acid System", Advanced Materials Research, Vols. 233-235, pp. 614-618, 2011

Online since:

May 2011

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$35.00

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