Research on CO2 Laser Micromachining PMMA Microchannel
CO2 laser direct-writing ablation of polymethylmethacrylate(PMMA) substrates is a new micromachining technology for microfluidic applications. An experiment research on CO2 laser micromachining PMMA was carried out to acquire the relationship between the microchannel depth and laser power, scan velocity and the number of passes, and the change of groove depth and width with the number of passes was also studied. It was revealed that the experimental results were in excellent agreement with theoretical data derived analytical model. The derivation between theoretical data and experimental results was very small only about 6 µm with the best range of laser power 15-40 W and scan velocity 0.2-0.5 m/s.
H. F. Xiang "Research on CO2 Laser Micromachining PMMA Microchannel", Advanced Materials Research, Vols. 271-273, pp. 74-78, 2011