New Applications of Laser on LED and Semi-Conductor Manufacturing

Shih Jeh Wu; Weike Vic Chao; Huei Sen Wang

doi:10.4028/www.scientific.net/AMR.317-319.533

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New Applications of Laser on LED and Semi-Conductor Manufacturing
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Effect of Impact Load on Transient Elastohydrodynamic Lubrication of Spur Gears
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 317-319New Applications of Laser on LED and...

New Applications of Laser on LED and Semi-Conductor Manufacturing

Abstract:

Laser technology has been applied in more and more areas of research. With its fast growth, faster and cheaper solution can be found in different industries. In this paper we present two applications of laser on LED and semi-conductor manufacturing. A new approach facilitated by laser micromachining for improving LED efficiency is introduced first. This is through change of stacking structure and the precision of up-to-date UV 355nm laser technology. The illumination area is increased due to the smaller connecting area (drilling size). Another work is the improving of leakage current of TiO2 film as dielectrics. Through the irradiation of 532nm DPSS laser the refractive index increases and the current leakage is reduced.

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Periodical:

Advanced Materials Research (Volumes 317-319)

Pages:

533-536

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.317-319.533

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Online since:

August 2011

Authors:

Shih Jeh Wu, Weike Vic Chao, Huei Sen Wang

Keywords:

Laser Dicing, Laser Drilling, LED, UV Laser

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References

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[5] Shih-Jeh Wu and Weike Vic Chao, Taiwan Patent #M391729 (2011). Figure 1 The comparison of LED price on sapphire and COW(chip on wafer e.g. 12mil×12mil) from 2008 to 2012. Figure 2 Sectional view of LED structure of traditional connection (left) and improved LED structure (right). Figure 3 LPD process for LPD process to deposit TiO2 thin film. Figure 3 Planar and illuminating views of LED structure of traditional connection (left): area 41583μm2 and improved LED structure (right): area 48826μm2 (+17.4%). Figure 4 The comparison of refractive indices and leakage current under irradiation of different laser energy.

DOI: 10.7554/elife.20832.018

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