Drilling parameters have great influences on hole accuracy and defect production. In this study, single factor test is applied to obtain the relationship between the torque deviation and the spindle speed n at different feeds per revolution fr. White Light Interferometer (WLI) is applied to measure the hole shape. Based on the frequency domain analysis of torque deviation, the cause of hole shape deviation is investigated. Relationship between the hole shape accuracy and drilling parameters is established, which can be used to predict the hole shape by analyzing the torque deviation. Moreover, the reasonable processing parameters can be selected to obtain drilling hole with ideal shape and satisfying production efficiency.