One Kind of High Precision Non-Contact Displacement Sensor and its Application

Xin Li; Yu Rong Chen; Sheng Huai Wang

doi:10.4028/www.scientific.net/AMR.328-330.2102

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 328-330One Kind of High Precision Non-Contact...

One Kind of High Precision Non-Contact Displacement Sensor and its Application

Abstract:

In this article, one new non-contact displacement sensor and its principle has been introduced; it is based upon improved Foucault focus detection and equipped with diffraction grating measuring system. Driven by piezoelectric actuator instead of voice coil motor and diffraction grating metrology system being adopted, the non-contact displacement sensor avoids non-linear error and other measurement error caused by the movement of the voice coil motor and therefore has higher measurement accuracy, which has be proved by series of experiments. During measuring the workpiece surface contour profiles, piezoelectric actuator drives focus object lens to make vertical displacement, and ensures focus in every sampling interval to go to the workpiece surface. In the mean time the focus error signal can be set to zero. The sensor has large range and high resolution, which can be applied in profile measurement. This non-contact displacement sensor resolution can reach 10nm.

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Periodical:

Advanced Materials Research (Volumes 328-330)

Pages:

2102-2107

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.328-330.2102

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Online since:

September 2011

Authors:

Xin Li, Yu Rong Chen, Sheng Huai Wang

Keywords:

Diffraction Grating Metrology System, Displacement Sensor, Non-Contact Measuring, Piezoelectric Actuator

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References

[1] J. Kagami. Measurement of Surface Profiles by the Focusing Method. Wear, Vol. 134(1996), pp.221-230.

Google Scholar

[2] I. Sherrington, E.H. Smith. Modern Measruement Techniques in Surface Metrology: Part I Stylus Instrument, Electron Microscopy and Non-optical Compactors. Wear, Vol. 125(1983), pp.201-210.

DOI: 10.1016/0043-1648(88)90118-4

Google Scholar

[3] I. Sherrington E.H. Smith. Modern Measurement Techniques in Surface Metrology : Part II Optical Instrument, Electron Microscopy and Non-optical Compactors. Wear, Vol. 125(1988), pp.54-61.

DOI: 10.1016/0043-1648(88)90118-4

Google Scholar

[4] Xuanze Wang , Xiaohua Dong, Jun Guo and Tiebang Xie, Two-dimensional displacement sensing using a cross diffraction grating scheme[J], Journal of Optics A: Pure and Applied Optics, Vol 6(2004), pp.106-111. (In Chinese).

DOI: 10.1088/1464-4258/6/1/019

Google Scholar

[5] Z. Wang P.J. Bryanston-Cross and D.J. Whitehouse. Phase difference determination by fringe pattern matching, Optics & Laser Technology, Vol. 28( 1998), p.417~422.

DOI: 10.1016/0030-3992(96)00015-1

Google Scholar