Cooperative Optimal Method for Two Level Models of Micro Device

Abstract:

With the gradual complication of micro devices, the poor manufacturability of product becomes a bottleneck. In this paper, we discuss the optimal design method that involves the model restriction, model revising and cooperative design management. Firstly, the design rules checking for the original model is introduced, which constrains the 3D models into an appropriate form to satisfy the manufacturing requirements. Then, the informational description of micro device involves two levels. The device level modeling focuses on geometric information, while the process level modeling works at manufacturability. Based on the two level models, the model revising procedure is performed in cooperative design environment. Furthermore, a polysilicon electro-thermal actuator is used to illustrate the cooperative optimal design approach.

• Periodical: Advanced Materials Research (Volumes 328-330)
• Pages: 783-787
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.328-330.783
• Online since: September 2011
• Authors: Zheng Liu, Hua Chen
• Keywords: Cooperative Design, Micro-Device, Optimal Design, Surface Micromachining

References

[1] M. Schlipf, S. Bathurst, K. Kippenbrock, et al.: A Structured Approach to Integrate MEMS and Precision Engineering Methods. CIRP Journal of Manufacturing Science and Technology, Vol. 3 (2010), p.236.

DOI: 10.1016/j.cirpj.2010.12.002

[2] M.S. McCorquodale, F.H. Gebara, K.L. Kraver, et al.: A Top-Down Microsystems Design Methodology and Associated Challenges, Proceedings of the Design, Automation and Test in Europe Conference and Exhibition (Los Alamitos CA, USA, 2003), Vol. 1, p.292.

DOI: 10.1109/date.2003.1253844

[3] V. Ananthakrishnan, R. Sarma and G.K. Ananthasuresh: Systematic Mask Synthesis for Surface Micromachined Microelectromechanical Systems, Journal of micromechanics and microengineering, Vol. 13 (2003), p.927.

DOI: 10.1088/0960-1317/13/6/316

[4] Y. Liu, P. Jiang, and D. Zhang: 3D-feature-based Structure Design for Silicon Fabrication of Micro Devices. Microsystem Technologies, Vol. 13 (2007), p.701.

DOI: 10.1007/s00542-006-0371-0

[5] Z. Fan, J. Wang, S. Achiche, et al.: Structured Synthesis of MEMS Using Evolutionary Approaches. Applied Soft Computing, Vol. 8 (2008), p.579.

DOI: 10.1016/j.asoc.2007.04.001

[6] F. Gao, Y.S. Hong and R. Sarma: Feature Model For Surface Micro-machined MEMS, Proceedings of ASME Design Engineering Technical Conferences (Chicago, USA, 2003), Vol. 1, p.149.

[7] J. Li, S. Gao and Y. Liu: Feature-based Process Layer Modeling for Surface Micro-machined MEMS, Journal of Micromechanics and Microengineering, Vol. 15 (2005), p.620.

DOI: 10.1088/0960-1317/15/3/026

[8] R. Schiek and R. Schmidt: Automated Surface Micro-machining Mask Creation from a 3D Model, Microsystem Technologies, Vol. 12 (2006), p.204.

DOI: 10.1007/s00542-005-0049-z

[9] J. Carter, et al.: MUMPs Design Handbook. Revision 11. 0 (Memscap Inc, USA 2005).

[10] R.W. Johnstone and M. Parameswaran: Modelling Surface-micromachined Electrothermal Actuators, Canadian Journal of Electrical and Computer Engineering, Vol. 29 (2004), p.193.

DOI: 10.1109/cjece.2004.1532523