Photocatalytic Activities of Mo Ions Implanted TiO2 Thin Films

Shu Kai Zheng

doi:10.4028/www.scientific.net/AMR.335-336.1508

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Effect of Conformable Substrate Thickness on an Eddy Current Sensor Array’s Output Characteristics
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Photocatalytic Activities of Mo Ions Implanted TiO₂ Thin Films
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Photocatalytic Activities of Mo Ions Implanted TiO₂ Thin Films

Abstract:

Transparent TiO₂ thin films were deposited onto microscope glass slides by means of d.c. magnetron sputtering method. In order to enhance the photocatalytic activity of TiO₂ thin films, Mo ions with different nominal doses were implanted into the TiO₂ thin films. The samples were characterized by different technologies including X-ray diffraction (XRD), X-ray photoelectron spectroscope (XPS) and UV-VIS-NIR spectrophotometer. The photodegradation results of methylene blue dye solution indicated that optimal dose of 2×10¹²ions/cm² Mo ion-implantation resulted in a higher photocatalytic activity in the implanted TiO₂ thin films.