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Research of Sapphire Wafer Scribing by Using UV Laser
Abstract:
The Processing advantages of UV laser were discussed in this paper. A series of experiments were carried out, some good results was achieved, which proved UV laser is fit for sapphire wafer processing. Then how processing parameters affects machining quality was discussed, which provides guidance to machining practice. The formation of grooves with good surface quality can be achieved by selecting appropriate laser parameters.
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90-93
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September 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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