Research of Sapphire Wafer Scribing by Using UV Laser
The Processing advantages of UV laser were discussed in this paper. A series of experiments were carried out, some good results was achieved, which proved UV laser is fit for sapphire wafer processing. Then how processing parameters affects machining quality was discussed, which provides guidance to machining practice. The formation of grooves with good surface quality can be achieved by selecting appropriate laser parameters.
Xiaodong Zhang, Zhijiu Ai, Prasad Yarlagadda and Yun-Hae Kim
M. L. Wang et al., "Research of Sapphire Wafer Scribing by Using UV Laser", Advanced Materials Research, Vol. 338, pp. 90-93, 2011