Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces

Wei Bin Rong; Gui Ming Huang; Le Feng Wang; Li Ning Sun

doi:10.4028/www.scientific.net/AMR.341-342.873

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 341-342Optimal Design of a Cantilever-Based Sensor for...

Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces

Abstract:

In order to achieve the requirement of measuring forces during micromanipulation, a cantilever-based sensor using optical laser and position sensitive device (PSD) to monitor cantilever deflection is designed. To increase the resolution of the sensor at the specified measurement range, mechanical analysis and noise analysis are adopted to optimize parameters of the cantilever-based sensor. The experiment results show that the cantilever-based sensor can achieve the measurement range of 20mN and the resolution of 6.74μN.

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Periodical:

Advanced Materials Research (Volumes 341-342)

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873-877

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.341-342.873

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Online since:

September 2011

Authors:

Wei Bin Rong, Gui Ming Huang, Le Feng Wang, Li Ning Sun

Keywords:

Cantilever-Based Sensor, Noise Analysis, Optimal Design

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