Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces
In order to achieve the requirement of measuring forces during micromanipulation, a cantilever-based sensor using optical laser and position sensitive device (PSD) to monitor cantilever deflection is designed. To increase the resolution of the sensor at the specified measurement range, mechanical analysis and noise analysis are adopted to optimize parameters of the cantilever-based sensor. The experiment results show that the cantilever-based sensor can achieve the measurement range of 20mN and the resolution of 6.74μN.
W. B. Rong et al., "Optimal Design of a Cantilever-Based Sensor for Measuring Micro-Forces", Advanced Materials Research, Vols. 341-342, pp. 873-877, 2012