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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 403-408An Investigation of the Nano-Structure Titanum...

An Investigation of the Nano-Structure Titanum Dioxde Thin Films as a Function of Film Thickness

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Abstract:

Using resistive heated method, Ti films of different thickness ranging from 10 to 200 nm were deposited and post-annealed at a temperature of 473K with a flow of oxygen. The optical properties were measured by transmission spectroscopy in spectral range of 200-2500 nm. The optical functions were obtained from the Kramers-Kronig analysis of the reflectivity curves. The effective medium approximation analysis was employed to establish the relationship between the nano-structure and Effective-Media Approximation (EMA) predictions.It was found the temperature of deposition and thefilm thickness play important roles in the nano-structure of the film and cause significant variations in the optical behaviour of thin Titanium oxide films.

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Periodical:

Advanced Materials Research (Volumes 403-408)

Pages:

3-7

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.403-408.3

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Online since:

November 2011

Authors:

Haleh Kangarloo, Fahime Farid Shaygan, Saeid Rafizadeh

Keywords:

Effective Medium Approximation, Hin Films, Kramers-Kronig, Optical Behavior, Spectrophotometry, Titanium Oxide

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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