Simulation and Characterization of a Novel Large Stroke Micromirror

Abstract:

This paper reports on the simulation and characterization of a microelectromechanical system (MEMS) micromirror fabricated with PolyMUMPs. The overall diameter of the hexagonal micrimirror, including mirror plate and 3 supporting cantilevers fixed around, is 450um. A 3D model is built in finite element method (FEM) with COMSOL. Simulations of the elevated height of mirror plate, pull-in voltage and eigenfrequency of the micromirror are carried out. The static and dynamic performances of the fabricated micromirror are characterized by Veeco Optical Profiler and Polytek MEMS System Analyzer. The comparison between measurement and simulation exhibits good concordance. Surface topography measurement shows the elevated height and stress-induced concave deformation of mirror plate almost the same scale as demonstrated in FEM simulation. The Pull-In voltages are measured to be around 32V in current-voltage curve which is almost the same as in FEM simulation with one electrode biased. The fundamental resonant frequency is measured to be 4.3k Hz in torsional motion and 4.9k Hz in piston motion.

• Periodical: Advanced Materials Research (Volumes 403-408)
• Pages: 3411-3417
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.3411
• Online since: November 2011
• Authors: Quan Sun, Zong Fu Jiang, Edmond Cretu
• Keywords: Characterization, Finite Element Analysis (FEA), Micro-Electromechanical System (MEMS), Micro-Mirror

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