Study on Dynamic Simulation Technology of Polar Coordinates Wafer-Handling Robot

Abstract:

Based on the analysis of the structure, function and transmission ways of polar coordinates wafer-handling robot, the radial liner stretching kinematics model of wafer-handling robot is established, and the kinematics character of the robot is analyzed, the kinematics equations of the robot is established. Finally, based on Microsoft Visual Studio 2008 and Pro/toolkit, the dynamic simulation of polar coordinates wafer-handling robot is realized.

• Periodical: Advanced Materials Research (Volumes 418-420)
• Pages: 2086-2089
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.418-420.2086
• Online since: December 2011
• Authors: Zhi Hua Sha, Mei Zhen Zhang, Sheng Fang Zhang
• Keywords: Dynamic Simulation, Kinematics Analysis, Pro/Toolkit, Wafer-Handling Robot

References

[1] D.M. Guo, R.K. Kang and J.X. Su: Chinese Journal of Mechanical Engineering. Vol. 39 (2003), p.100 (In Chinese)

[2] D.M. Guo, R.K. Kang and Z.J. Jin: World Manufacturing Engineering & Market. Vol. (2003), p.35 (In Chinese)

[3] T. Chiaki: Industrial Robot. Vol. 28 (2001), p.406

[4] Y.X. Song, Z.H. Yang and S.C. Li: Opto-Electronic Engineering. Vol. 35 (2008), p.116 (In Chinese)

[5] M. Cong, S.J. Zhang and Z.J. Jin: Manufacturing Automation. Vol. 27 (2005), p.36 (In Chinese)

[6] W.B. Wang. Examples of Pro/E Wildfire 4.0 Second Development (Tsinghua University Press, Beijing 2010) (In Chinese)