Kinematics Research for a High-Precise Multi-Gratings Mosaic Mechanism

Abstract:

A novel design of high load capacity multiaxis positioning stages with accuracy in the range of nanometers is presented. For strokes of 2mm with no play and high stiffness a general design principle supporting five Cartesian degrees of freedom has been developed using a new parallel kinematic topology based on Parallelogram arrangements. The five uniform feed drives are improved dual mode mechanism with servomotor and ballscrew as macro-actuator and piezoelectric transducer (PZT) with resolution of 1.2nm as micro-actuator. The performance of the setup and its kinematic properties are described as well as resolution of the five motions and their crosstalk. The setup has been implemented with outstanding characteristics and excellent reliability for alignment of a multigrating mosaic compressor in a PW-class CPA-laser.

• Periodical: Advanced Materials Research (Volumes 452-453)
• Pages: 1496-1500
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.452-453.1496
• Online since: January 2012
• Authors: Li Hua Lu, Ying Chun Liang, Fu Li Yu, Bao Ku Su
• Keywords: Kinematics, Multi-Gratings Mosaic, Parallel Mechanism

References

[1] T. Harada, H. Sakuma and M. Fuse: Proc. of SPIE, Vol. 3450 (1998), p.11.

[2] J. Hoose, Grand, Gratings: Photonics Spectra, Vol. 12(1995), p.118.

[3] B. Thomas, Z. Semyon: Proc. of SPIE, Vol. 4485(2002), p.370.

[4] T. J. Zhang, M. Yonemura and Y. Kato: Opt. Commu., Vol. 145(1998), p.367.

[5] T. J. Kessler, J. Bunkenburg and H. Huang: Opt. Letters, Vol. 29(2004), p.635.

[6] Y. Hu, L. Zeng and L. Li: Opt. Commu., Vol. 269(2007), p.285.

[7] W. Dong, L. Sun and Z. Du: Prec. Eng., Vol. 32(2008), p.222.

[8] T. Noll, K. Holldack and G. Reichardt: Prec. Eng., Vol. 33(2009), p.291.