An Electronic Modle of Mems Disk Resonator

Ying Qian Jia; Zheng Ping Zhao

doi:10.4028/www.scientific.net/AMR.457-458.278

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 457-458An Electronic Modle of Mems Disk Resonator

An Electronic Modle of Mems Disk Resonator

Abstract:

RF-MEMS resonator can meet the development of communication and attract great attention now. Applied to electric system, mechanical resonator caused some difficulties to the circuit design， the electric parameters should be extracted. Through mechanical-electrical analogy the electronic parameter is extracted and the electrical equivalent circuit established. ANSYS is used to simulate the vibration of the disk. Using the electronic parameters, an oscillator is designed and simulated.

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Periodical:

Advanced Materials Research (Volumes 457-458)

Pages:

278-282

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.457-458.278

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Online since:

January 2012

Authors:

Ying Qian Jia, Zheng Ping Zhao

Keywords:

Electronic Parameters, Frequency, MEMS Resonator, Oscillator, Q

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