Uncertainty Evaluation of SEM-Based Nanoroughness Measurement

Feng Xia Zhao; Qing Hai Wang; Lin Na Zhang; Peng Zheng

doi:10.4028/www.scientific.net/AMR.472-475.1319

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 472-475Uncertainty Evaluation of SEM-Based Nanoroughness...

Uncertainty Evaluation of SEM-Based Nanoroughness Measurement

Abstract:

In metrology, a measurement process without uncertainty evaluation is incomplete. The same applies to nanoroughness metrology. In this paper, Scanning Electron Microscopy (SEM） measurement uncertainty of nanoroughness is studied based on ISO Geometric Product Specification and Verification (GPS). The uncertainty propagation model of SEM-based nanoroughness measurement is presented. The evaluation model of SEM-based standard measurement uncertainty is conducted. As a case study, the line edge roughness uncertainty produced by the JSM-6700F SEM is evaluated.

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Advanced Manufacturing Technology, ICMSE 2012

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Advanced Materials Research (Volumes 472-475)

Pages:

1319-1322

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.472-475.1319

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Online since:

February 2012

Authors:

Feng Xia Zhao, Qing Hai Wang, Lin Na Zhang, Peng Zheng

Keywords:

Geometric Product Specification and Verification (GPS), Nanoroughness, Scanning Electron Microscope (SEM), Uncertainty

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