FEM Design and Experiment of a Micro-Gripper Based on Piezoelectric Material

Zhi Li Long; Lu Fan Zhang; Jian Guo Zhang

doi:10.4028/www.scientific.net/AMR.479-481.434

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 479-481FEM Design and Experiment of a Micro-Gripper Based...

FEM Design and Experiment of a Micro-Gripper Based on Piezoelectric Material

Abstract:

Micro-gripper is a key module in IC/LED wire bonding. The paper presents a micro-gripper combining with piezoelectric material and flexible structure. The dynamic and static characteristics of the micro-gripper are calculated by finite element method, and the natural frequencies, the vibration modes, as well as the deflection range of the micro-gripper are obtained. In the experiment, the high-speed camera was used to track the vibration of the micro-gripper, and the relationship between deflection range and driven voltage was established. The vibration behavior was measured by a non-contact laser measuring device. These results can help improve the reliability of the micro-gripper used in wire bonding.

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Periodical:

Advanced Materials Research (Volumes 479-481)

Pages:

434-438

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.479-481.434

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Online since:

February 2012

Authors:

Zhi Li Long, Lu Fan Zhang, Jian Guo Zhang

Keywords:

Flexible Structures, Micro-Gripper, Piezoelectric Material, Wire Bonding

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