[1]
Y-T Liu, C-K Wang . A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators . Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, vol. 223, pp.2017-2027, (2009).
DOI: 10.1243/09544062jmes1422
Google Scholar
[2]
Dong-Soo Paik, Kyoung-Ho Yoo, Chong-Yun Kang. Multilayer piezoelectric linear ultrasonic motor for camera module. J Electroceram. vol. 22, pp.346-351, (2009).
DOI: 10.1007/s10832-008-9513-3
Google Scholar
[3]
Scottl. Sharp, Jefferys. N. Paine,Jonathan D. Blotter. Design of a Linear Ultrasonic Piezoelectric Motor. Journal of Intelligent Material Systems and Structures, vol. 21, pp.961-973, (2010).
DOI: 10.1177/1045389x10374890
Google Scholar
[4]
Wei Gao, Shinji Sato, Yoshikazu Arai. A linear-rotary stage for precision positioning. Precision Engineering, vol. 34, pp.301-306. (2010).
DOI: 10.1016/j.precisioneng.2009.07.003
Google Scholar
[5]
Chih-Jer Lin, Sheng-Ren Yang. Precise positioning of piezo-actuated stages using hysteresis observer based control[J]. Mechatronics, vol. 16, pp.417-426(2006).
DOI: 10.1016/j.mechatronics.2006.03.005
Google Scholar
[6]
Yung-Tien Liu, Rong-Fong Fung, et al. Precision position control using combined piezo-VCM actuators[J]. Precision Engineering, vol. 29, pp.411-422(2005).
DOI: 10.1016/j.precisioneng.2004.12.009
Google Scholar
[7]
Yung-Tien Liu, Guo-You Le. A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators[J]. Towards Synthesis of Micro-/Nano-systems, vol. 20, pp.121-126(2007).
DOI: 10.1007/1-84628-559-3_20
Google Scholar
[8]
Chih-Liang Chu, Sheng-Hao Fan, et al. A novel long-travel piezoelectric-driven linear nanopositioning stage [J]. Precision Engineering, vol. 30, pp.85-95(2006).
DOI: 10.1016/j.precisioneng.2005.05.002
Google Scholar
[9]
Yoshihiro Nomura, Hisayuki Aoyama. Development of inertia driven micro robot with nano tilting stage for SEM operation[J]. Microsyst Technol , vol. 13, pp.1347-1352(2007).
DOI: 10.1007/s00542-006-0360-3
Google Scholar
[10]
Kee-Joe Lima, Jong-Sub Lee, et al. Fabrication and characteristics of impact type ultrasonic motor[J]. Journal of the European Ceramic Society, vol. 27, pp.4159-4162(2007).
Google Scholar