Investigation on Microstructure of CrN-Based Solid Self-Lubricant Composite Coating

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Abstract:

The CrN-based solid self-lubricant composite coating was obtained by magnetron sputtering and low-temperature ion sulfuring. The XPS, AES and SEM equipped with EDS were utilized to observe and analyze the microstructure of the composite coating. The results show that there are Cr, Mo, N, S in the composite coating, and the phase structure is CrN, MoS2 and a few oxide. The element S was implanted 500nm in depth. For the sulfurized layer is extremely apt to be oxidized, in this paper, the source of element O is analyzed in detail through comparative studies on different methods for preservation of specimens, and the film-forming mechanism of CrN-based solid self-lubricant composite coating is discussed.

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Advanced Materials Research (Volumes 538-541)

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406-409

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June 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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