Study on Phase-Shifting Profilometry of Tilted Measurement System

Abstract:

Based on research of the traditional phase-shifting profilometry (PSP) method, a tilted measurement system is proposed. The proposed technology makes three constraints of the traditional phase-shifting profilometry measurement system less constrains. The exit pupil of the projecting system and the entrance pupil of the CCD imaging system are not horizontal and not placed at equal height. The optical axis in the CCD imaging system is not necessarily perpendicular with a specific tilting angle to the reference plane. The optical axises of the CCD imaging system and projecting system are not coplanar. The two axises do not intersect with each other. Compared to the traditional phase-shifting profilometry the proposed method offers a flexible way to calculate height distribution.

• Periodical: Advanced Materials Research (Volumes 562-564)
• Pages: 2157-2162
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.562-564.2157
• Online since: August 2012
• Authors: Bai Tong He, Jian Liang Xu
• Keywords: Measurement System, Phase, Phase-Shifting Profilometry (PSP)

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