An Optimization Approach for 25um Pitch Microbolometers

Hong Xi Zhou; Chao Chen; Tao Wang

doi:10.4028/www.scientific.net/AMR.602-604.2259

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 602-604An Optimization Approach for 25um Pitch...

An Optimization Approach for 25um Pitch Microbolometers

Abstract:

In this paper a high-performance single level uncooled microbolometer detectors with a unit cell size of 25um×25um is introduced. An efficient detectors requires low Noise Equivalent Temperature Difference(NETD) (<80mK,f/1,60Hz)and low thermal time constant (<8.3ms). The trade-offs between physical parameters are studied to attain the optimum design parameters including the thermal conductance, the thermal time constant and the active area, consequently, optimum design parameters such as the width and the length of the support arms, which can satisfy the demand of an efficient detectors is achieved.

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Periodical:

Advanced Materials Research (Volumes 602-604)

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2259-2262

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.602-604.2259

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Online since:

December 2012

Authors:

Hong Xi Zhou, Chao Chen, Tao Wang

Keywords:

NETD, Thermal Conductance, Thermal Time Constant

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References

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