Prepared for GaAs PHEMT Material

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Abstract:

In this paper, GaAs PHEMT samples are prepared by the method of molecular beam epitaxy (MBE), The optimal parameters are determined by studying the impact of the barrier layer thickness, spacer layer thickness, Al composition of the barrier layer and the spacer layer , the channel thickness and channel In composition on Ns and μn.

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594-597

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December 2012

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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