In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry

F. Gao; H. Muhamedsalih; X. Jiang

doi:10.4028/www.scientific.net/AMR.622-623.357

Paper Titles

Effect of Filler Metal’s Choice on the Mechanical and Corrosion Properties of Gas Tungsten Arc Welded AISI 304l
p.335

Optimization of Resistance Spot Welding on Aluminum Magnesium 5052 Grade with 2³ Factorial Designs
p.340

The Dependency of the Tool Life on the Cutting Speed at the Investigation of the Tool with Specific Geometry
p.347

The Comparison of Surface Roughness Characteristics Achieved by the Machining with Conventional and Unconventional Geometry of Tools
p.352

In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry
p.357

Machinability Studies in Hot Machining of Ti-6Al-4V Alloy
p.361

Experimental Investigation of Various Chip Parameters during Machining of the Ti25Nb3Mo3Zr2Sn Beta Titanium Alloy
p.366

Surface Roughness Characteristics and Structure of Steel C45 after WC-Co Coating and Laser Treatment
p.370

Investigations into Effect of Tool Wear on Surface Integrity in Dry Turning of Al6061
p.375

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 622-623In-Process Fast Surface Measurement Using...

In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry

Abstract:

A wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process. White light spectral scanning interferometry, together with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and those with large step heights. An active servo control system is used to serve as a phase compensating mechanism to eliminate the effects of environmental noise. The system can be used for on-line or in-process measurement on a shop floor.

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Periodical:

Advanced Materials Research (Volumes 622-623)

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357-360

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.622-623.357

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Online since:

December 2012

Authors:

F. Gao, H. Muhamedsalih, X. Jiang

Keywords:

In-Process Measurement, Structured Surface, Wavelength Scanning

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