Characterization and Properties of CrTiN Films

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Abstract:

A series of CrTiN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrTiN have preferential orientation of (200). The films show low friction and low wear rate at a certain percentage of the Ti content.

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301-303

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December 2012

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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