Micro Vibration Sensor Based on the Nano Measuring Machine

Meng Chao Li; Zhong Hai He

doi:10.4028/www.scientific.net/AMR.643.149

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 643Micro Vibration Sensor Based on the Nano Measuring...

Micro Vibration Sensor Based on the Nano Measuring Machine

Abstract:

External micro vibration is an important obstacle factor for the measuring result of scanning tunneling microscopy. In order to achieve better result, the influence of vibration must be eliminated. In this study, a large range new sensor with two nano stages is built up to detect the micro vibration for the compensation of the results. Finnaly, the vibration detection experiments are made to illustrate the rationality of the sensor.

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Periodical:

Advanced Materials Research (Volume 643)

Pages:

149-152

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.643.149

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Online since:

January 2013

Authors:

Meng Chao Li, Zhong Hai He

Keywords:

Micro Vibration, Nano Measuring Machine, Scanning Tunneling Microscopy, Sensor

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