Null Compensator Testing Convex Freeform Surface Mirror with CGH Technology

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Abstract:

The Computer Generated Hologram(CGH)technique is the main method for optical testing the free form surface .For testing a convex free form surface mirror, a CGH element with the surface testing, interferometer and free form mirror precise position function was designed by use of appropriative software, the testing precision was less than 0.011λ(λ=632.8nm)in RMS value by this means.

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163-166

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February 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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