p.10
p.15
p.19
p.24
p.30
p.35
p.40
p.47
p.51
New Laser Cutting Technology of Sapphire Wafers on Crystals
Abstract:
The work is devoted to development of new cutting technology of semiconductor wafers on crystals by a method of laser controlled thermocracking. There are results of numerical and experimental researches of the cut sapphire wafers on crystals for light-emitting diodes by means of two lasers (СО2 laser and UV laser).
Info:
Periodical:
Pages:
30-34
Citation:
Online since:
February 2013
Price:
Сopyright:
© 2013 Trans Tech Publications Ltd. All Rights Reserved
Share:
Citation: