Research of the Workpiece-Stage Control System Based on the ACR9000 in the Composite Coating Equipment of MEVVAII and FAD

Abstract:

In order to realize the extensive application of technologies of MEVVAII and FAD, the composite equipment has been developed for surface modification and coating films. In this paper, for the first time, the servo control system based on ACR9000 has been used to control workpiece-stage of the composite equipment. Eight target disks are installed on workpiece-stage. Each of target disks can be mounted about 1300 PCB micro tools. So, the equipment can satisfy the requirement for mass production. Experimental results show that the coating unevenness is less than ±14%, better than those of traditional equipments which is less than ±29%. The main purpose of the paper is to introduce the design of workpiece-stage and its three motion modes of rotary positioning, uniform rotation and variable speed rotation, and coating effects corresponding to three motion modes have been verified by experiments.

• Periodical: Advanced Materials Research (Volume 668)
• Pages: 410-414
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.668.410
• Online since: March 2013
• Authors: Rui Xia Zhang, Bin Liao, Zhi Guo Liu, Xian Ying Wu
• Keywords: Composite Coating Equipment of MEVVAII and FAD, Rotary Positioning, Uniform Rotation, Variable Speed Rotation, Workpiece-Stage

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