Design, Simulation and Optimization of a New Micro-Structural Gas Sensor

Abstract:

Micro-structural gas sensor with a new kind of electrode is designed. Platinum filament is selected as gold electrodes, and SiO₂ is used as the thermal and electricity insulation layer. The simulation results of ANSYS reveal that when the thickness of SiO₂, thickness of Si substrate, electrode with and electrode space are 50, 250, 15 and 60 µm, respectively, the sensors can own higher temperature and uniform temperature distributing in the center. The magnetic field distribution is also analyzed by ANSYS, and the results show that the new electrodes can eliminate magnetic field from the heater on the measuring signal interference, which is benefit for the improvement of sensor performance.

• Periodical: Advanced Materials Research (Volume 677)
• Pages: 125-129
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.677.125
• Online since: March 2013
• Authors: Xiao Bo Zhang, Chang Bai Liu, Li Liu, Hao Shan, Lian Yuan Wang, Shou Chun Li, Xiao Chi, Xiao Qing Bo
• Keywords: ANSYS, Magnetic Field Distribution, Micro-Hotplate, Temperature Distributing

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