Study on Predicting the Deformed Membranes Based on Silicon Nitride Materials with New Deflection Functions for Calculating the Capacitance of Circular Diaphragm CMUTs

Xu Dong Suo; Wei Jie Sun; Zheng Dong Sun; John T.W. Yeow

doi:10.4028/www.scientific.net/AMR.703.3

Paper Titles

Study on Predicting the Deformed Membranes Based on Silicon Nitride Materials with New Deflection Functions for Calculating the Capacitance of Circular Diaphragm CMUTs
p.3

Fractal Research in Metal Material Fracture Invalidation
p.8

Explosive Properties Analysis of Metallic Composites
p.12

Simulation Technique Application in Composite Material Structure Manufacture
p.16

Shear Band Feature in Two Bulk Metallic Glasses with Different Inherent Plasticity
p.20

Characterization of Shear Bands in Zr_64.13Cu_15.75Ni_10.12Al₁₀and Zr₆₅Cu₁₅Ni₁₀Al₁₀BMGs
p.24

Study on Polyvinyl Alcohol Hydrogel Materials for Improving the Performance of Artificial Articular Cartilage
p.29

Study on Environmental Materials with Treatment of Sweet Potato Starch Wastewater by Coagulation Precipitation Method
p.33

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 703Study on Predicting the Deformed Membranes Based...

Study on Predicting the Deformed Membranes Based on Silicon Nitride Materials with New Deflection Functions for Calculating the Capacitance of Circular Diaphragm CMUTs

Abstract:

A new idea is presented which develops a general model predicting the deflection profile of clamped circular diaphragm of Capacitive Micromachined Ultrasonic Transducers (CMUTs) in order to calculate its capacitance. The CMUTs we consider is made of silicon nitride material which is widely used because of its low intrinsic stress. And the general model proposed in this paper is highly accurate in predicting the deformed membranes and exhibits excellent agreement with 3D-FEA results in capacitance deviation less than 1%. These new established deflection functions can be used to implement a much higher accurate design methodology for CMUTs and other MEMS-based capacitive type sensors built with circular diaphragm.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 703)

Pages:

3-7

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.703.3

Citation:

Cite this paper

Online since:

June 2013

Authors:

Xu Dong Suo, Wei Jie Sun, Zheng Dong Sun, John T.W. Yeow

Keywords:

Capacitance, Circular Diaphragm, Deflection Function

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] O. Oralkan, A. S. Ergun, J. A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T. H. Lee and B. T. Khuri-Yakub: Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 49 (2002), p.1596–1610.

DOI: 10.1109/tuffc.2002.1049742

Google Scholar

[2] A. Logan and J. T. W. Yeow: Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-Based wafer bonding process, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 56 (2009), p.1074–1084.

DOI: 10.1109/tuffc.2009.1141

Google Scholar

[3] S. Timoshenko and S. Woinowsky-Krieger: Theory of Plates and Shells (McGraw-Hill, New York, NY, USA, 2nd edition 1959).

Google Scholar

[4] M. Rahman and S. Chowdhury: A highly accurate method to calculate capacitance of MEMS sensors with circular membranes, Electro/Information Technology, 2009, pp.178-181.

DOI: 10.1109/eit.2009.5189606

Google Scholar

[5] H. E. Elgamel: A simple and efficient technique for the simulation of capacitive pressure transducers, Sensors and Actuators A, vol. 77 (1999), p.183–186.

DOI: 10.1016/s0924-4247(98)00355-0

Google Scholar