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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 724-725Preparation of Anodic Aluminum Oxide...

Preparation of Anodic Aluminum Oxide Nano-Templates on Polycrystalline Silicon Substrates

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Abstract:

The anodic aluminum oxide (AAO) templates on polycrystalline silicon substrate are studied for growth of ordered nano-dot arrays in order to fabricate the porous silicon layers. The AAO templates on polycrystalline silicon substrate with pores of average diameter 50nm were successfully prepared by one-step anodization of high pure aluminum layer deposited on polycrystalline silicon in oxalic acid solution. Scanning electron microscopy (SEM) showed that alumina nano-pore arrays were nicely constructed with smooth wall morphologies and well-defined diameters.

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Periodical:

Advanced Materials Research (Volumes 724-725)

Pages:

63-66

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.724-725.63

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Online since:

August 2013

Authors:

Guo Feng Ma, Hong Ling Zhang, Hong Bo Fu, Li Na Sun, Chun Lin He

Keywords:

Aluminum Anodic Oxide, Nanotemplates, Polycrystalline Silicon

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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