Inner Hole Diameter Measuring Based on Capacitive Sensor

Xuan Sun; Yu Zhen Ma; Yong Xin Yu; Yi Zhong Zheng

doi:10.4028/www.scientific.net/AMR.739.596

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 739Inner Hole Diameter Measuring Based on Capacitive...

Inner Hole Diameter Measuring Based on Capacitive Sensor

Abstract:

nner hole diameter measuring system based on capacitive sensor was introduced in this paper, the structure characteristic of coaxial cylindrical capacitive probe in measuring inner hole diameter was analyzed;aiming at the signal analysis and control for the whole measurement system, the equipotential guard ring technique was adopted to eliminate edge effect caused for the sensors effective measuring polar plate, the transform circuit with operational amplifier was adopted to overcome the nonlinear defects resulted from polar distance change, the driving cables technique was used to reduce the influence of parasitic capacitance;and then we realize the precision diameter measurement in holes any depth.

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Periodical:

Advanced Materials Research (Volume 739)

Pages:

596-601

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.739.596

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Online since:

August 2013

Authors:

Xuan Sun, Yu Zhen Ma, Yong Xin Yu, Yi Zhong Zheng

Keywords:

Capacitive Probe Sensor, Diameter, Inner Hole, Measurement

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References

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