Optical Emission Spectroscopy of Argon Plasma Jet

Kanchaya Honglertkongsakul

doi:10.4028/www.scientific.net/AMR.770.245

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 770Optical Emission Spectroscopy of Argon Plasma Jet

Optical Emission Spectroscopy of Argon Plasma Jet

Abstract:

Argon plasma jet in a single-electrode configuration was generated at low temperature and atmospheric pressure by 50 kHz radiofrequency power supply. Optical Emission Spectroscopy (OES) was used to investigate the local emissivity of argon plasma in the range between 200 and 1,100 nm. The spatial distribution of reactive species was measured at different distances of the plasma expansion from the nozzle exit such as 0.0, 0.5, 1.0, 1.5, 2.0, 2.5 and 3.0 cm. These measurements were obtained to analyze the plasma parameters such as electron temperature and electron density. The effect of distances of the plasma expansion from the nozzle exit on the plasma parameters was studied. The main intensive argon lines were found in the region between 690 and 970 nm. The electron temperature was found in the range of 0.5-1.1 eV. The electron density was found in the range of 4.0x10¹²-1.2x10¹³ cm^-3. The plasma parameters strongly depended on the distances of the plasma expansion from the nozzle exit.

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Periodical:

Advanced Materials Research (Volume 770)

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245-248

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https://doi.org/10.4028/www.scientific.net/AMR.770.245

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September 2013

Authors:

Kanchaya Honglertkongsakul

Keywords:

Electron Density, Electron Temperature, Plasma Jet, Plasma Parameters

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