Research on Surface Roughness of Die Steel in Micro-Etching

Hong Guang Huang; Guan Wang; Zhong Ning Guo; Qing Song; Yu Deng

doi:10.4028/www.scientific.net/AMR.785-786.896

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 785-786Research on Surface Roughness of Die Steel in...

Research on Surface Roughness of Die Steel in Micro-Etching

Abstract:

In this study, the 300 µm width micro-channel was manufactured by spray etching method. The surface roughness was analyzed by Laser scanning con-focal microscope. The relationship of the surface roughness and etching factor such as spray etching pressure, mask gap and time had been studied. The results show that the surface roughness increases initially, and then reduces with the size of mask gap. While the roughness increases as the spraying pressure increases. The etching time plays slightly effect on roughness for it has no impact on the etch uniformity as mask gap and spray pressure do.

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Periodical:

Advanced Materials Research (Volumes 785-786)

Pages:

896-900

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.785-786.896

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Online since:

September 2013

Authors:

Hong Guang Huang, Guan Wang*, Zhong Ning Guo, Qing Song, Yu Deng

Keywords:

Mask Gap, Spray Pressure, Surface Roughness (SR)

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* - Corresponding Author

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