Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-Coated Bearing Steel

Abstract:

In order to investigate the influence of magnetron sputtering parameters on surface properties, hardness and friction tests were carried out for TiN-coated bearing steel sputtered under different deposition times varied from 5 to 30 minutes. Hardness of coated specimens was increased by magnetron sputtered and markedly affected by deposition time. Coated TiN thin films on the surface can also effectively improve the friction properties of the bearing steels. The deposition times from 5 to 10 minutes is the most suitable condition to improve the surface friction properties and hardness for bearing steel under the sputtering power with 200W.

• Periodical: Advanced Materials Research (Volumes 785-786)
• Pages: 970-973
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.785-786.970
• Online since: September 2013
• Authors: Nu Yan*, Xiao Chen Xiong
• Keywords: Bearing Steel, Magnetron Sputtering, TiN Flims, Wear-Resisting Property

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