Research on Visualization Modeling of Plant for IC Packaging

Abstract:

Plant model is critical data in enterprise information system, which is the basis of ERP and MES system. Combined with processing flow and physical layout of equipment in semiconductor industry, key technologies of visual plant model are introduced based on SP95 standard. Design ideas are described from perspectives of basic architecture, model building. The system is integrated, reconfigurable and can be implemented rapidly in front and back end of semiconductor Industry through secondary development and customization. Based on the system, a case of plant model was constructed to prove the validity of this theory in semiconductor industry.

• Periodical: Advanced Materials Research (Volume 811)
• Pages: 531-537
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.811.531
• Online since: September 2013
• Authors: Li Peng
• Keywords: Plant Model, Semiconductor, Variable Model, Visualization

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