Investigate the Characteristics of 0.65(K_0.5Bi_0.5TiO₃)-0.35BaTiO₃ Films at Various Deposition Temperatures

Abstract:

0.65(K_0.5Bi_0.5)TiO₃0.35BaTiO₃ (KBT-BT3) ceramics were synthesized using a two-step calcination process that combined hydrothermal and conventional calcination processes. After sintered into ceramic target, KBT-BT3 films were deposited on Pt/Ti/Si and SiO₂/Si/Al substrates by radio frequency magnetron (RF) sputtering at various temperatures. The surface morphologies and thicknesses of KBT-BT3 films were characterized by field emission scanning electron microscopy, and the thickness increased with increasing deposition temperature. XRD patterns showed that all KBT-BT3 films were amorphous and higher deposition temperature had no apparent effects to improve the crystalline orientation. The effects of deposition temperatures on the properties of the current-electric filed, polarization-applied electric field, and capacitance-voltage curves were also investigated. As deposition temperatures of KBT-BT3 films increased from room temperature to 400°C, the leakage current density had no apparent variation but the threshold voltage was shifted to lower value. The theorems for the effects of deposition temperature on the properties of KBT-BT3 films were also investigated.

• Periodical: Advanced Materials Research (Volume 813)
• Pages: 372-376
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.813.372
• Online since: September 2013
• Authors: W.C. Tzou, C.G. Kuo, P.S. Cheng, Y.H. Lin, Cheng Fu Yang
• Keywords: 0.65(K_0.5Bi_0.5TiO₃)–0.35BaTiO₃, C-V Curve, I-V Curve, P-E Curve

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