SEM Image and EDS Composition Analysis of Al2O3 Power under Low Vacuum Level Condition

Zhi Gang Wang; Min Jing; Teng Teng Yao; Ke Gao Liu

doi:10.4028/www.scientific.net/AMR.820.92

Paper Titles

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Flammability and Thermal Degradation of Polystyrene/Cadmium Sulfate Nanocomposites
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Stopping Power for Ions Moving in Magnetized Plasma
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SEM Image and EDS Composition Analysis of Al₂O₃ Power under Low Vacuum Level Condition
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Research on Ultrasonic Testing of Coarse-Grain Materials with Hilbert-Huang Transform
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Wetting Angle Measurement of Liquid PbBi on RAFM Steel Surface Based on Ellipse Fitting
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Residual Stress Analysis of Polycrystalline Diamond after Electrical Discharge Machining
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Effect of Buffer Layer Thickness on Fatigue and Residual Stress of Welded High-Strength Low-Alloy
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 820SEM Image and EDS Composition Analysis of Al2O3...

SEM Image and EDS Composition Analysis of Al₂O₃ Power under Low Vacuum Level Condition

Abstract:

The surface morphology of the Al₂O₃ powder was observed by SEM and the composition content was analyzed by EDS spectrum under different vacuum level condition. The effects of the atmosphere pressure on the SEM image quality and EDS analysis were explored systematically. The platinum sputtering treatment on the materials surface in high vacuum mode is beneficial to the observation of the images but has negtive effects on the analysis of O and Al elements. The decrease of vacuum degree in low vacuum mode can result in the drop of the image resolution and EDS spectrum accuracy. However, clear SEM image and EDS composition analysis result near to the real element kinds and contents of sample can be obtained in the low vacuum mode of 1Pa~50Pa.