Structure and Properties of TiAlLaN Coatings Deposited at Various Ar/N2 Flow Ratio Using a Mid-Frequency Magnetron Sputtering System

Hao Du; Hai Bo Zhao; Ji Xiong; Lin Lin Wang; Guang Xian

doi:10.4028/www.scientific.net/AMR.834-836.629

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 834-836Structure and Properties of TiAlLaN Coatings...

Structure and Properties of TiAlLaN Coatings Deposited at Various Ar/N₂ Flow Ratio Using a Mid-Frequency Magnetron Sputtering System

Abstract:

TiAlLaN coatings were deposited on the cemented carbide substrates by mid-frequency magnetron sputtering system. The effects of Ar/N2 flow ratio on the composition, structure, adhesion and hardness followed with elastic modulus and H/E ratio were investigated systematically. Results indicate that all the Ti/Al ratios of the coatings were higher than that of the Ti/Al ratio in the target; however, the Ti/Al ratio increased with the Ar/N2 flow ratio changed. XRD patterns show that the intensity of (111) peak was elevated with the Ar/N2 flow ratio increased. Meanwhile, the peak shifted to lower angles, which implied increases of the lattice parameter. The TiAlLaN coating under the Ar/N2 flow ratio of 3:1 showed the best adhesion, the highest hardness and the lowest H/E ratio which indicated perfect wear resistance.

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Periodical:

Advanced Materials Research (Volumes 834-836)

Pages:

629-633

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.834-836.629

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Online since:

October 2013

Authors:

Hao Du, Hai Bo Zhao*, Ji Xiong, Lin Lin Wang, Guang Xian

Keywords:

Adhesion, Ar/N₂ Flow Ratio, Hardness, Structure, TiAlLaN Coatings

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