Characterization of TiO2 Thin Films Prepared by Vacuum Evaporation

Li Li Wang; Yi Wei Zhang; Chun Mei Zhang; Zheng Duo Wang; Tao Meng

doi:10.4028/www.scientific.net/AMR.887-888.783

Paper Titles

Investigation of the Preparation of Anodized Nanoporous Alumina Array
p.766

Morphology and Orientation in Thin Film of Polystyrene-b-Polylactide Prepared by Solution-Casting
p.770

Biofilm-Electrode Process for Nitrate Removal from Micro-Polluted Water
p.775

Effective Anisotropy Constant of Bilayer Film
p.779

Characterization of TiO₂ Thin Films Prepared by Vacuum Evaporation
p.783

Influence of Calcium Carbonate Powder on Water Requirement and Flowability of Self-Compacting Mortar Incorporating Bagasse Ash
p.789

Development of Reinforced Structure Designed Composite Pavement
p.793

Design and Experiment on the Road Pavement for Rush to Repair
p.797

Usage of Steel Slag in Concrete as Coarse Aggregates
p.801

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 887-888Characterization of TiO2 Thin Films Prepared by...

Characterization of TiO₂ Thin Films Prepared by Vacuum Evaporation

Abstract:

The TiO2 thin films were prepared by vacuum evaporation on glass using TiO2 powder 99.99% as coating material and with varying deposition speed. The TiO2 thin films were characterized by a-step device, X-ray diffraction (XRD), atomic force microscope (AFM). The influence of deposition rate were discussed. The results indicated that thickness of the TiO2 thin film was prepared under the deposition rate of 4Å/sec was 200 nm at room temperature, with amorphous structure. The film changed to anatase crystal structure when was annealed at 450 °C for one hour and the TiO2 thin film was uniform and well combined with the glass substrate.

You might also be interested in these eBooks

Advances in Materials and Materials Processing IV

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 887-888)

Pages:

783-786

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.887-888.783

Citation:

Cite this paper

Online since:

February 2014

Authors:

Li Li Wang, Yi Wei Zhang, Chun Mei Zhang, Zheng Duo Wang, Tao Meng*

Keywords:

Anatase Crystal, Deposition Speed, Thin Film, TiO₂, Vacuum Evaporation

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] S. Phadke, J.D. Sorge, S. Hachtmann, D.P. Birnie, III. Broad band optical characterization of sol-gel TiO2 thin film microstructure evolution with temperature. Thin Solid Films. 518 (2010) , P5467.

DOI: 10.1016/j.tsf.2010.04.021

Google Scholar

[2] M.M. Yusuf, H. Imai, H. Hirashima, Preparation of porous titania film by modified sol-gel method and its application to photocatalyst. J. Sol-Gel Sci. Technol. 25, (2002), P65.

Google Scholar

[3] P.R. McCurdy, L.J. Sturgess, S. Kohli, E.R. Fisher, Investigation of the PECVD TiO2–Si(100) interface. Appl. Surf. Sci. 233(2004), P69.

DOI: 10.1016/j.apsusc.2004.03.009

Google Scholar

[4] R. Ayouchi, C. Casteleiro, R. Schwarz, J.R. Barrado, n. F. Martí , Optical properties of TiO2 thin films prepared by chemical spray pyrolysis from aqueous solutions. Phys. Status Solidi C 7(2010), P933.

DOI: 10.1002/pssc.200982895

Google Scholar

[5] C. Shao, W. H. Wang, M. Y. Hsu, L. C. Wang, Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films. J. Opt. Soc. Am. A 16(1999), P1477.

DOI: 10.1364/josaa.16.001477

Google Scholar

[6] M. Walczak, M. Oujja, J. Marco, M. Sanz, M. Castillejo, Pulsed laser deposition of TiO2: Diagnostic of the plume and characterization of nanostructured deposits. Appl. Phys. A Mater. 93(2008), P735.

DOI: 10.1007/s00339-008-4704-y

Google Scholar