Electrical Characterization of Al/Ag Contacts on Al-Zn Codoped SnO2 Thin Films Deposited by  Solid-State Chemical Vapor Deposition

Lee Siang Chuah; S.S. Tneh; Z. Hassan

doi:10.4028/www.scientific.net/AMR.925.433

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Electrical Characterization of Al/Ag Contacts on Al-Zn Codoped SnO₂Thin Films Deposited by Solid-State Chemical Vapor Deposition

Abstract:

Excellent tin oxide (SnO₂) ohmic and Schottky contacts are need for device utilizations and essential electrical characterization. Up to now, metal contact property studies on SnO₂ are inadequate and provide miscellaneous results. Ohmic contacts have been studied on high quality epitaxial n-type tin oxide thin films that were grown by solid state chemical vapor deposition (SSCVD). To the best of our knowledge, this is the first time that Al-Zn co-doped SnO₂ films grown by SSCVD have been reported. Non-alloyed Al/Ag, Al, and Ag contacts were characterized by current-voltage measurements. Ohmic contacts were realized using Al, Ag , and Al/Ag after an air treatment of the SnO₂ surface.