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The Micro-Fabrication of Multidimensional Structure of Silicon by Selection Corrosion
Abstract:
Multibranched silicon microstructure, such as branched root-like microwires and branched coralline-like micorwires, have been rationally synthesized via a simple one-step, inexpensive, and catalyst-free fabrication technique. The multiple-branched root-like silicon microwires which obtained at 0.07% Sr addition of Al-Si alloys have lengths of several tens of micrometers and its transverse sizes range from 300 to 500 nm, while the transverse sizes of multiple-branched coralline-like silicon microwires are much smaller. The recommend of patterning process of multiple-branched silicon microwires show that selective corrosion of Sr modified Al-Si alloys is that the aluminum is wiped out while the silicon micorwires as a hidden microstructure revealed by etching.
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1410-1413
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June 2014
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© 2014 Trans Tech Publications Ltd. All Rights Reserved
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