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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 97-101CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone...

CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone Composite Abrasive on Hard Disk Substrate

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Abstract:

A novel α-alumina-g-polyvinylpyrrolidone (α-Al2O3-g-PVP) composite abrasive was prepared by surface grafting polymerization. The chemical mechanical polishing (CMP) performances of the composite abrasive on hard disk substrate were investigated with a UNIPOL-1502 polishing machine. Analyses on the surface of polished substrate indicated that the α-Al2O3-g-PVP composite abrasive exhibited lower surface roughness, less scratch, and improved post-CMP cleaning performances than pure α-alumina abrasive under the same testing conditions.

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Manufacturing Science and Engineering I

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Periodical:

Advanced Materials Research (Volumes 97-101)

Pages:

2135-2139

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.97-101.2135

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Online since:

March 2010

Authors:

Hong Lei, Nai Jing Bu, Feng Ling Chu, Ping Hao, Xiao Li Hu

Keywords:

Chemical Mechanical Polishing (CMP), Cleaning, Composite Abrasive, Hard Disk Substrate, α-Alumina-g-Polyvinylpyrrolidone

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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