Modeling and Simulation of Re-Entrant Semiconductor Wafer Fabrication Lines with PM Using GSPN

Abstract:

Article Preview

Semiconductor wafer fabrication factories are characterized by re-entrant flows, dynamic and uncertain environments, strict production control requirements and so on. Re-entrant flow means a product routing that consists of multiple visits to a workstation during the manufacturing processes. In this paper, a modeling approach based on generalized stochastic Petri nets is presented. Specifically, a Petri net model representing a re-entrant flow line with three centers and six machines is modeled. Work release policies (WRP) and queuing disciplines (QD) are also added to the model, which take into account the machine preventive maintenance (PM) requirement. Finally, a simulation study is used to analyze the model, which provides support for scheduling decision in shorter time.

Info:

Periodical:

Advanced Materials Research (Volumes 97-101)

Edited by:

Zhengyi Jiang and Chunliang Zhang

Pages:

2469-2472

DOI:

10.4028/www.scientific.net/AMR.97-101.2469

Citation:

Z. G. Jiang et al., "Modeling and Simulation of Re-Entrant Semiconductor Wafer Fabrication Lines with PM Using GSPN ", Advanced Materials Research, Vols. 97-101, pp. 2469-2472, 2010

Online since:

March 2010

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.