Modeling and Simulation of Re-Entrant Semiconductor Wafer Fabrication Lines with PM Using GSPN

Abstract:

Semiconductor wafer fabrication factories are characterized by re-entrant flows, dynamic and uncertain environments, strict production control requirements and so on. Re-entrant flow means a product routing that consists of multiple visits to a workstation during the manufacturing processes. In this paper, a modeling approach based on generalized stochastic Petri nets is presented. Specifically, a Petri net model representing a re-entrant flow line with three centers and six machines is modeled. Work release policies (WRP) and queuing disciplines (QD) are also added to the model, which take into account the machine preventive maintenance (PM) requirement. Finally, a simulation study is used to analyze the model, which provides support for scheduling decision in shorter time.

• Periodical: Advanced Materials Research (Volumes 97-101)
• Pages: 2469-2472
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.97-101.2469
• Online since: March 2010
• Authors: Zhi Gao Jiang, Ming Dong, Peng Tian, Dong Yang
• Keywords: Generalized Stochastic Petri Net (GSPN), Preventive Maintenance (PM), Queuing Discipline (QD), Re-Entrant, Work Release Policy (WRP)

References

[1] M.C. Zhou: IEEE Trans. Semicond. Manuf. Vol. 11 (1998), p.333.

[2] K. Kempf: Detailed Description of Multiple Product Re-entrant Semiconductor Manufacturing System Example (Intel Corporation, Technology, and Manufacturing Group, 1994).

[3] M.L. Speatman, D.L. Woodruff, W.J. Hopp: Int. J. Prod. Res. Vol. 28 (1990), p.879.

[4] G.O. Nicholas, D.G. Jonathan, A. Adrienne: Robot. Comput. -Integr. Manuf. Vol. 17 (2001), p.5.

[5] A.A. Desrochers, R.Y. Al-Jaar. in: Applications of Petri nets in manufacturing systems (IEEE Publications, 1995).

[6] T. Murata: Proc. IEEE. Vol. 77 (1989), p.541.