A New Miniaturized CNC Machine Tool
A miniaturized CNC (Computerized Numerical Control) milling machining equipment was mentioned for micro milling processing. The equipment has a highest spindle speed of 90000rpm and the positioning accuracy of submicron. Furthermore, it described the design of CNC servo system of precision stage driven by linear motor. The servo experiments results verified the excellent static and dynamic performance of the system. The machining tests included a plane with a surface roughness of 215nm using a end milling cutter of Φ0.2μm, micro straight slots with a dimension error range of 1-2μm using a ball-end cutter of Φ0.2μm and some complex structures. The analysis results of these tests show that the system is able to fulfill the micro milling machining of micro components.
Zhengyi Jiang and Chunliang Zhang
L. Zhang et al., "A New Miniaturized CNC Machine Tool", Advanced Materials Research, Vols. 97-101, pp. 3259-3262, 2010