Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

Abstract:

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Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.

Info:

Periodical:

Advanced Materials Research (Volumes 97-101)

Edited by:

Zhengyi Jiang and Chunliang Zhang

Pages:

3803-3806

DOI:

10.4028/www.scientific.net/AMR.97-101.3803

Citation:

Y. X. Hu et al., "Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses", Advanced Materials Research, Vols. 97-101, pp. 3803-3806, 2010

Online since:

March 2010

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Price:

$35.00

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