Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

Yong Xiang Hu; Heng Zhang; Zheng Qiang Yao

doi:10.4028/www.scientific.net/AMR.97-101.3803

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 97-101Formation of Periodical Sub-Micron Sized...

Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

Abstract:

Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.

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Periodical:

Advanced Materials Research (Volumes 97-101)

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3803-3806

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https://doi.org/10.4028/www.scientific.net/AMR.97-101.3803

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Online since:

March 2010

Authors:

Yong Xiang Hu, Heng Zhang, Zheng Qiang Yao

Keywords:

Interference, Laser Ablation, Microstructure, Nanosecond Laser

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