Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses
Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.
Zhengyi Jiang and Chunliang Zhang
Y. X. Hu et al., "Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses", Advanced Materials Research, Vols. 97-101, pp. 3803-3806, 2010