Engineering Aspects of Shape Memory Film Actuators and Sensors

Manfred Kohl; Berthold Krevet; Thomas Grund; Johannes Barth; Daniel Auernhammer; Fadila Khelfaoui

doi:10.4028/www.scientific.net/AST.59.119

Paper Titles

Influence of Thermomechanical Treatment on Transformation Temperatures of Cu-Al-Ni Shape Memory Alloys
p.92

Pseudoelasticity of Cu-13.8Al-Ni Alloys Containing V and Nb
p.101

Dynamic and Static Displacements of Atoms in B2-Phase of TiNi Alloy
p.108

Shape Memory Behavior in Some (Ti,Zr,Hf)₅₀(Ni,Cu)₅₀ Alloys Elaborated by Glass Devitrification
p.113

Engineering Aspects of Shape Memory Film Actuators and Sensors
p.119

Transformation/Deformation Behavior and its Constitutive Equation for Ti-Ni-Cu Shape Memory Alloy
p.129

Effect of Micro-Voids on Plasticity in NiTi-Alloys
p.135

Experimental Characterization of NiTi SMAs Thermomechanical Behaviour Using Temperature and Strain Full-Field Measurements
p.140

Thermomechanical Characterization of Shape Memory Alloy Tubular Composite Structures
p.150

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 59Engineering Aspects of Shape Memory Film Actuators...

Engineering Aspects of Shape Memory Film Actuators and Sensors

Abstract:

Shape memory alloy (SMA) films enable the development of novel mechanically active microsystems as they provide large force and stroke in restricted space. The performance of SMA film actuators and sensors does not only depend on SMA material properties, but also requires a mechanically and thermally optimized design as well as a suitable fabrication technology being compatible to existing microsystems technologies. The paper gives an overview on the engineering aspects of SMA film actuators and sensors. These aspects are illustrated by selected examples such as bridge microactuators, microvalves and microscanners. The examples demonstrate the ongoing progress in the field, current limitations as well as existing opportunities for emerging new applications.