Si: Surface Reconstruction
a.179
Si/SiGe: B Diffusion and Ion Implantation
a.180
Si/Si3N4: Point Defects
a.181
Si/SiO2: Point Defects
a.182
Si/SiO2: Point Defects
a.183
Si/SiO2: Point Defects
a.184
SiGe: Point Defects
a.186
SiGe/Si: Interdiffusion and Dislocations
a.187