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Formation Mechanisms of Paramagnetic Centers in Si/SiO2 Structures
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Formation Mechanisms of Paramagnetic Centers in Si/SiO2 Structures

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Defect and Diffusion Forum Vols. 127-128 View Preview

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Periodical:

Defect and Diffusion Forum (Volumes 127-128)

Pages:

1-8

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.127-128.1

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Online since:

March 1995

Authors:

K. Awazu, K. Watanabe, Hiroshi Kawazoe

Keywords:

a-SiO2 Film, E' Center, Paramagnetic Centers, Pb Centers, Radiation Induced Defects, Si/SiO2 Structure

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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