Stresses during Silicide Formation: A Review

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Periodical:

Defect and Diffusion Forum (Volumes 129-130)

Edited by:

D.L. Beke and I.A. Szabó

Pages:

137-150

DOI:

10.4028/www.scientific.net/DDF.129-130.137

Citation:

F. M. d'Heurle, O. Thomas, "Stresses during Silicide Formation: A Review", Defect and Diffusion Forum, Vols. 129-130, pp. 137-150, 1996

Online since:

March 1996

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Price:

$35.00

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